Download book Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer
Download book Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer
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Author: Tan Tran-Duc
Number of Pages: 128 pages
Published Date: 30 Jul 2012
Publisher: LAP Lambert Academic Publishing
Publication Country: Saarbrucken, Germany
Language: English
Format: Pdf
ISBN: 9783848447435
File Name: Design.and.Fabrication.of.a.3-Dof.Piezoresistive.Micro.Accelerometer.pdf
Download Link: Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer
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This book presented a hierarchical MEMS design synthesis and optimization process developed for a specific structure of accelerometer. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. After fabrication process, the utilizing of Allan variance method is also very useful to determine errors caused by both of the intrinsic sensor's noises and interface circuit's. Another important contribution of this book is that comprehensive analysis considering the impact of many parameters, such as the doping concentration, temperature, noises, and power consumption on optimization of the sensitivity and resolution has been proposed in order to enhance sensitivity and resolution of the accelerometer.
Read online Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer Buy Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer Download and read Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer ebook, pdf, djvu, epub, mobi, fb2, zip, rar, torrent Download to iPad/iPhone/iOS, B&N nook Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer ebook, pdf, djvu, epub, mobi, fb2, zip, rar, torrent
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Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer. Tan Tran-Duc
Author: Tan Tran-Duc
Number of Pages: 128 pages
Published Date: 30 Jul 2012
Publisher: LAP Lambert Academic Publishing
Publication Country: Saarbrucken, Germany
Language: English
Format: Pdf
ISBN: 9783848447435
File Name: Design.and.Fabrication.of.a.3-Dof.Piezoresistive.Micro.Accelerometer.pdf
Download Link: Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer
---------------------------------------------------------------
This book presented a hierarchical MEMS design synthesis and optimization process developed for a specific structure of accelerometer. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. After fabrication process, the utilizing of Allan variance method is also very useful to determine errors caused by both of the intrinsic sensor's noises and interface circuit's. Another important contribution of this book is that comprehensive analysis considering the impact of many parameters, such as the doping concentration, temperature, noises, and power consumption on optimization of the sensitivity and resolution has been proposed in order to enhance sensitivity and resolution of the accelerometer.
Read online Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer Buy Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer Download and read Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer ebook, pdf, djvu, epub, mobi, fb2, zip, rar, torrent Download to iPad/iPhone/iOS, B&N nook Design and Fabrication of a 3-Dof Piezoresistive Micro Accelerometer ebook, pdf, djvu, epub, mobi, fb2, zip, rar, torrent
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